Additional insights


  • R. K. Heilmann, M. Ahn, A. Bruccoleri, et al. "Diffraction Efficiency of 200 nm Period Critical-Angle Transmission Gratings in the Soft X-Ray and Extreme Ultraviolet Wavelength Bands," Appl. Opt. 50 (2011)
  • D. L. Voronov, M. Ahn, E. H. Anderson, et al. "High Efficiency 5000 Lines/mm Multilayer-Coated Blazed Grating for Extreme Ultraviolet Wavelengths," Opt. Lett. 35 (2010)
  • M. Ahn, R. Heilmann, M. Schattenburg, "Fabrication of 200 nm-period blazed transmission gratings on silicon-on-insulator wafers," J. Vac. Sci. Technol. B (Nov/Dec 2008)
  • R. Heilmann, M. Ahn, E. Gullikson, M. Schattenburg "Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors," Optics Express 16 (June 2008)
  • M. Ahn, R. Heilmann, M. Schattenburg, “Fabrication of ultra-high aspect-ratio freestanding gratings on silicon-on-insulator wafers,” J. Vac. Sci. Technol. B 25 (Nov/Dec 2007)