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Minseung Ahn, Ph.D.

Technology Specialist, Patent Agent

Washington, D.C.
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202-626-7708
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[email protected]
Minseung Ahn, Ph.D. Photo
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About Minseung

Minseung Ahn is a Technology Specialist and Patent Agent in the Washington, DC office of Fish & Richardson. Dr. Ahn’s practice supports the preparation and prosecution in the areas of mechanical engineering, electrical and computer technology, semiconductor processing and devices, and software. Prior to joining the firm, Dr. Ahn worked at Intel Corp. where he developed next-generation CPU and SoC products. Dr. Ahn also has extensive research and industry experience in mechanical engineering, semiconductor equipment, control systems, optical instruments, haptics, MEMS, and nanotechnology.

Selected Publications

M. Ahn, R. Heilmann, M. Schattenburg, “Fabrication of ultra-high aspect-ratio freestanding gratings on silicon-on-insulator wafers,” J. Vac. Sci. Technol. B 25, Nov/Dec 2007

M. Ahn, R. Heilmann, M. Schattenburg, “Fabrication of 200 nm-period blazed transmission gratings on silicon-on-insulator wafers,” J. Vac. Sci. Technol. B, Nov/Dec 2008

R. Heilmann, M. Ahn, E. Gullikson, M. Schattenburg “Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors ,” Optics Express 16, June 2008

D. L. Voronov, M. Ahn, E. H. Anderson, et al. “High Efficiency 5000 Lines/mm Multilayer-Coated Blazed Grating for Extreme Ultraviolet Wavelengths,” Opt. Lett. 35, 2010.

R. K. Heilmann, M. Ahn, A. Bruccoleri, et al. “Diffraction Efficiency of 200 nm Period Critical-Angle Transmission Gratings in the Soft X-Ray and Extreme Ultraviolet Wavelength Bands,” Appl. Opt. 50, 2011

Focus Areas
Education

Ph.D., Mechanical Engineering, Massachusetts Institute of Technology (2009)


M.S., Mechanical Engineering, Massachusetts Institute of Technology (2005)


B.S., Mechanical and Aerospace Engineering, Seoul National University (1999)

Admissions
  • U.S. Patent and Trademark Office 2017
Languages
  • English
  • Korean
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