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Minseung Ahn

Technology Specialist

Washington, D.C.
202-626-7708
ahn@fr.com
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Minseung Ahn Photo

Background

Minseung Ahn is a Technology Specialist in the Washington, DC office of Fish & Richardson. Dr. Ahn’s practice supports the preparation and prosecution in the areas of mechanical engineering, electrical  and computer technology, semiconductor processing and devices, and software. Prior to joining the firm, Dr. Ahn worked at Intel Corp. where he developed next generation CPU and SoC products. Dr. Ahn also has extensive research and industry experience in mechanical engineering, semiconductor equipment, control systems, optical instruments, haptics, MEMS, and nanotechnology.

Education

Ph.D., Massachusetts Institute of Technology 2009
Mechanical Engineering


M.S., Massachusetts Institute of Technology 2005
Mechanical Engineering


B.S., Seoul National University 1999
Mechanical and Aerospace Engineering

Languages

  • English
  • Korean

Other Distinctions

Selected Publications

M. Ahn, R. Heilmann, M. Schattenburg, “Fabrication of ultra-high aspect-ratio freestanding gratings on silicon-on-insulator wafers,” J. Vac. Sci. Technol. B 25, Nov/Dec 2007

M. Ahn, R. Heilmann, M. Schattenburg, “Fabrication of 200 nm-period blazed transmission gratings on silicon-on-insulator wafers,” J. Vac. Sci. Technol. B, Nov/Dec 2008

R. Heilmann, M. Ahn, E. Gullikson, M. Schattenburg “Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors ,” Optics Express 16, June 2008

D. L. Voronov, M. Ahn, E. H. Anderson, et al. “High Efficiency 5000 Lines/mm Multilayer-Coated Blazed Grating for Extreme Ultraviolet Wavelengths,” Opt. Lett. 35, 2010.

R. K. Heilmann, M. Ahn, A. Bruccoleri, et al. “Diffraction Efficiency of 200 nm Period Critical-Angle Transmission Gratings in the Soft X-Ray and Extreme Ultraviolet Wavelength Bands,” Appl. Opt. 50, 2011